The input gases enter the remote plasma source and are transported to the main process chamber to react.

The plasma source is small magnetic fields created by convection cells in the solar atmosphere.

These ion sources use a plasma source or electric discharge to create ions.

Large transient heat fluxes can be created when the plasma source is coupled to a capacitor bank.

Inductively coupled plasma sources usually use argon as a fuel.

Also, the data obtained from experiments using an inductively coupled plasma source is often linear.

The plasma source is used to heat a sample.

Inductively coupled plasma source may be used for the detection of approximately 60 different elements.

Using a plasma source, a monatomic reactive species is generated.

Firstly, many plasma sources heat the electrons more strongly than the ions.